Download or read book Ultra Clean Processing of Silicon Surfaces IV written by Marc Heyns and published by Trans Tech Publications Ltd. This book was released on 1998-11-21 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: The proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98) cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).