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Language: en
Pages: 446
Pages: 446
Type: BOOK - Published: 2005 - Publisher: SPIE Press
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were
Language: en
Pages: 503
Pages: 503
Type: BOOK - Published: 2011-08-10 - Publisher: John Wiley & Sons
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
Language: en
Pages: 937
Pages: 937
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media
Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a tra
Language: en
Pages: 284
Pages: 284
Type: BOOK - Published: 2011-01-01 - Publisher: Nova Science Pub Incorporated
Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nonfabrication technologies and manufacturi
Language: en
Pages: 864
Pages: 864
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press
This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from e
