Download or read book Patterning of Material Layers in Submicron Region written by U. S. Tandon and published by John Wiley & Sons. This book was released on 1993 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: It invokes the interests of the reader into the wonderland of nanominiaturization for industrial, biological and fundamental applications. Its contents portray the advent and relevance of submicron structures and proffer a perception of materials, modules and schemes for preparing them.