High-Q CMOS-compatible Poly-SiGe Electrostatic RF MEMS Resonators

High-Q CMOS-compatible Poly-SiGe Electrostatic RF MEMS Resonators
Author :
Publisher :
Total Pages : 386
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ISBN-10 : UCAL:C3500974
ISBN-13 :
Rating : 4/5 (74 Downloads)

Book Synopsis High-Q CMOS-compatible Poly-SiGe Electrostatic RF MEMS Resonators by : Brian Lee Bircumshaw

Download or read book High-Q CMOS-compatible Poly-SiGe Electrostatic RF MEMS Resonators written by Brian Lee Bircumshaw and published by . This book was released on 2005 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt:


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