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Language: en
Pages: 581
Pages: 581
Type: BOOK - Published: 2013-05-02 - Publisher: Cambridge University Press
A comprehensive MEMS textbook, with worked examples and numerous homework problems.
Language: en
Pages: 559
Pages: 559
Type: BOOK - Published: 2013 - Publisher:
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sen
Language: en
Pages: 312
Pages: 312
Type: BOOK - Published: 2004 - Publisher: Artech House
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Syste
Language: en
Pages: 492
Pages: 492
Type: BOOK - Published: 2005-07-08 - Publisher: CRC Press
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) d
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 2006-05-17 - Publisher: Springer
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are c