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Language: en
Pages: 266
Pages: 266
Type: BOOK - Published: 2013-10-18 - Publisher: Springer Science & Business Media
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, log
Language: en
Pages: 306
Pages: 306
Type: BOOK - Published: 2021-06-28 - Publisher: John Wiley & Sons
Learn about fundamental and advanced topics in etching with this practical guide Atomic Layer Processing: Semiconductor Dry Etching Technology delivers a hands-
Language: en
Pages: 300
Pages: 300
Type: BOOK - Published: 2007 - Publisher: The Electrochemical Society
The continuously expanding realm of Atomic Layer Deposition (ALD) Applications is the symposium focus. ALD can enable the precise deposition of ultra-thin, high
Language: en
Pages: 352
Pages: 352
Type: BOOK - Published: 2008-11-20 - Publisher: John Wiley & Sons
Chemical growth methods of electronic materials are the keystone of microelectronic device processing. This book discusses the applications of metalorganic chem
Language: en
Pages: 300
Pages: 300
Type: BOOK - Published: 2007 - Publisher: The Electrochemical Society
This issue gives an overview of the cutting edge research in the various areas where Atomic Layer Deposition (ALD) can be used, enabling the identification of i
