Atomic Layer Deposition Applications 2
Author | : Ana Londergan |
Publisher | : The Electrochemical Society |
Total Pages | : 300 |
Release | : 2007 |
ISBN-10 | : 9781566775427 |
ISBN-13 | : 1566775426 |
Rating | : 4/5 (27 Downloads) |
Download or read book Atomic Layer Deposition Applications 2 written by Ana Londergan and published by The Electrochemical Society. This book was released on 2007 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: This issue gives an overview of the cutting edge research in the various areas where Atomic Layer Deposition (ALD) can be used, enabling the identification of issues, challenges, and areas where further research is needed. Contributions include: Memory applications, Interconnects and contacts, ALD Productivity enhancement and precursor development, ALD for optical and photonic applications, and Applications in other areas, such as MEMs, nanotechnology, fabrication of sensors and catalysts, etc.