Photomask Fabrication Technology
Author | : Benjamin G. Eynon |
Publisher | : McGraw Hill Professional |
Total Pages | : 589 |
Release | : 2005-08-11 |
ISBN-10 | : 9780071588911 |
ISBN-13 | : 0071588914 |
Rating | : 4/5 (11 Downloads) |
Download or read book Photomask Fabrication Technology written by Benjamin G. Eynon and published by McGraw Hill Professional. This book was released on 2005-08-11 with total page 589 pages. Available in PDF, EPUB and Kindle. Book excerpt: Photomasks, the printing masters for the fabrication of integrated circuits, have become a necessity of modern semiconductor manufacturing. This book details the science and technology of industrial photo mask production, including fundamental principles, industrial production flows, and technological evolution.