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The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last d
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Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominate
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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, in
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Pages: 536
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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combi
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Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges face
