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Language: en
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Type: BOOK - Published: 2011-08-10 - Publisher: John Wiley & Sons
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
Language: en
Pages: 446
Pages: 446
Type: BOOK - Published: 2005 - Publisher: SPIE Press
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were
Language: ru
Pages: 704
Pages: 704
Type: BOOK - Published: 2009 - Publisher: SPIE Press
Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This b
Language: en
Pages: 474
Pages: 474
Type: BOOK - Published: 1971 - Publisher: Los Angeles : Tamarind Lithography Workshop
Language: en
Pages: 0
Pages: 0
Type: BOOK - Published: 2011-03-08 - Publisher: SPIE Press
Chemistry and Lithography provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a wide readership. The b
