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Language: en
Pages: 441
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Type: BOOK - Published: 2010-08-19 - Publisher: Cambridge University Press
An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, t
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Type: BOOK - Published: 2010 - Publisher:
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Pages: 442
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Type: BOOK - Published: 2014-05-14 - Publisher:
A comprehensive and up-to-date guide to RF MEMS theory and applications.
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Language: en
Pages: 406
Pages: 406
Type: BOOK - Published: 2003-07-25 - Publisher: John Wiley & Sons
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control
