Related Books

The Effects of Synchrotron Radiation on the Mechanical Properties of X-ray Lithography Mask Membranes
Language: en
Pages: 278
Authors: Hector T. H. Chen
Categories:
Type: BOOK - Published: 1995 - Publisher:

DOWNLOAD EBOOK

From Instrumentation to Nanotechnology
Language: en
Pages: 350
Authors: J.W. Gardner
Categories: Technology & Engineering
Type: BOOK - Published: 2024-11-01 - Publisher: CRC Press

DOWNLOAD EBOOK

Addressed to physical and chemical scientists and engineers, this book provides information on the design, manufacture, and assessment of components with critic
Analysis and Simulation of Pattern Placement Errors in Advanced Lithographic Masks
Language: en
Pages: 362
Authors: Adam H. Fisher
Categories:
Type: BOOK - Published: 1998 - Publisher:

DOWNLOAD EBOOK

Mechanical Characterization of X-ray and SCALPEL Lithographic Masks
Language: en
Pages: 266
Authors: Michael P. Schlax
Categories:
Type: BOOK - Published: 1998 - Publisher:

DOWNLOAD EBOOK

Plasma Processing for VLSI
Language: en
Pages: 544
Authors: Norman G. Einspruch
Categories: Technology & Engineering
Type: BOOK - Published: 2014-12-01 - Publisher: Academic Press

DOWNLOAD EBOOK

VLSI Electronics: Microstructure Science, Volume 8: Plasma Processing for VLSI (Very Large Scale Integration) discusses the utilization of plasmas for general s