Selected papers revised from the proceedings of the Fifth International Symposium on Sputtering and Plasma Processes
Author | : International Symposium on Sputtering and Plasma Processes (5, 1999, Kanazawa) |
Publisher | : |
Total Pages | : 570 |
Release | : 2000 |
ISBN-10 | : OCLC:634035884 |
ISBN-13 | : |
Rating | : 4/5 (84 Downloads) |
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