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Rapid Thermal Processing and beyond: Applications in Semiconductor Processing
Language: en
Pages: 427
Authors: Wielfried Lerch
Categories: Technology & Engineering
Type: BOOK - Published: 2008-03-24 - Publisher: Trans Tech Publications Ltd

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Special topic volume with invited papers only
Rapid Thermal Processing for Future Semiconductor Devices
Language: en
Pages: 161
Authors: H. Fukuda
Categories: Science
Type: BOOK - Published: 2003-04-02 - Publisher: Elsevier

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This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, o
Handbook of Semiconductor Manufacturing Technology
Language: en
Pages: 3276
Authors: Yoshio Nishi
Categories: Technology & Engineering
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

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Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semi
Rapid Thermal Processing of Semiconductors
Language: en
Pages: 374
Authors: Victor E. Borisenko
Categories: Technology & Engineering
Type: BOOK - Published: 2013-11-22 - Publisher: Springer Science & Business Media

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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing e
Subsecond Annealing of Advanced Materials
Language: en
Pages: 330
Authors: Wolfgang Skorupa
Categories: Technology & Engineering
Type: BOOK - Published: 2013-12-16 - Publisher: Springer Science & Business Media

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The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. T