Nanolithography

Nanolithography
Author :
Publisher : Woodhead Publishing
Total Pages : 599
Release :
ISBN-10 : 9780857098757
ISBN-13 : 0857098756
Rating : 4/5 (57 Downloads)

Book Synopsis Nanolithography by : M Feldman

Download or read book Nanolithography written by M Feldman and published by Woodhead Publishing. This book was released on 2014-02-13 with total page 599 pages. Available in PDF, EPUB and Kindle. Book excerpt: Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics


Nanolithography Related Books

Nanolithography
Language: en
Pages: 599
Authors: M Feldman
Categories: Technology & Engineering
Type: BOOK - Published: 2014-02-13 - Publisher: Woodhead Publishing

DOWNLOAD EBOOK

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerfu
Nanolithography and Patterning Techniques in Microelectronics
Language: en
Pages: 424
Authors: D Bucknall
Categories: Science
Type: BOOK - Published: 2005-09-30 - Publisher: Elsevier

DOWNLOAD EBOOK

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patternin
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
Language: en
Pages: 238
Authors: Kenichi Takahata
Categories: Science
Type: BOOK - Published: 2013-05-29 - Publisher: BoD – Books on Demand

DOWNLOAD EBOOK

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials
Nanofabrication
Language: en
Pages: 0
Authors: José María de Teresa
Categories: Nanolithography
Type: BOOK - Published: 2020 - Publisher:

DOWNLOAD EBOOK

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of na
Nanofabrication
Language: en
Pages: 344
Authors: Maria Stepanova
Categories: Technology & Engineering
Type: BOOK - Published: 2011-11-08 - Publisher: Springer Science & Business Media

DOWNLOAD EBOOK

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at