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Microelectronic Materials
Language: en
Pages: 560
Authors: C.R.M. Grovenor
Categories: Science
Type: BOOK - Published: 1989-01-01 - Publisher: CRC Press

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This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in micr
Microelectronic Materials
Language: en
Pages: 557
Authors: C.R.M. Grovenor
Categories: Science
Type: BOOK - Published: 2017-10-05 - Publisher: Routledge

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This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in micr
Microelectronic Materials and Processes
Language: en
Pages: 992
Authors: R.A. Levy
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower
Defects in Microelectronic Materials and Devices
Language: en
Pages: 772
Authors: Daniel M. Fleetwood
Categories: Science
Type: BOOK - Published: 2008-11-19 - Publisher: CRC Press

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Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that eng
Chemical Mechanical Planarization of Microelectronic Materials
Language: en
Pages: 337
Authors: Joseph M. Steigerwald
Categories: Science
Type: BOOK - Published: 2008-09-26 - Publisher: John Wiley & Sons

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Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its univ