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Lithography for Submicron Structures
Language: en
Pages: 208

Lithography for Submicron Structures

Authors:
Categories: Ion beam lithography
Type: BOOK - Published: 1990 - Publisher:

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The Physics of Submicron Lithography
Language: en
Pages: 502

The Physics of Submicron Lithography

Authors: Kamil A. Valiev
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations
Fabrication of Micron and Submicron Compound Structures by Combining Interference Lithography and Nanoimprint Lithography
Language: en
Pages: 182

Fabrication of Micron and Submicron Compound Structures by Combining Interference Lithography and Nanoimprint Lithography

Authors: 邱信傑
Categories:
Type: BOOK - Published: 2009 - Publisher:

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Patterning of Material Layers in Submicron Region
Language: en
Pages: 206

Patterning of Material Layers in Submicron Region

Authors: U. S. Tandon
Categories: Technology & Engineering
Type: BOOK - Published: 1993 - Publisher: John Wiley & Sons

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It invokes the interests of the reader into the wonderland of nanominiaturization for industrial, biological and fundamental applications. Its contents portray
Submicron Lithography
Language: en
Pages: 0

Submicron Lithography

Authors:
Categories: Photolithography
Type: BOOK - Published: 1982 - Publisher:

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