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Language: en
Pages: 271
Pages: 271
Type: BOOK - Published: 2007-05-16 - Publisher: Springer Science & Business Media
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and c
Language: en
Pages: 400
Pages: 400
Type: BOOK - Published: 2013-11-27 - Publisher: Springer Science & Business Media
Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framewo
Language: en
Pages: 649
Pages: 649
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. T
Language: en
Pages: 154
Pages: 154
Type: BOOK - Published: 2017-06-14 - Publisher: BoD – Books on Demand
Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is
Language: en
Pages: 582
Pages: 582
Type: BOOK - Published: 2008-12-11 - Publisher: American Institute of Physics
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encomp
