Nanofabrication by Ion-Beam Sputtering
Author | : Tapobrata Som |
Publisher | : CRC Press |
Total Pages | : 366 |
Release | : 2012-11-27 |
ISBN-10 | : 9789814303767 |
ISBN-13 | : 9814303763 |
Rating | : 4/5 (67 Downloads) |
Download or read book Nanofabrication by Ion-Beam Sputtering written by Tapobrata Som and published by CRC Press. This book was released on 2012-11-27 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt: Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attracti