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Language: en
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Authors: P. Rai-Choudhury
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Contains useful process details, recipes, tables, charts and includes numerous device applications.
Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineer
Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin
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This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both
Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affectin