Download or read book 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) written by IEEE Staff and published by . This book was released on 2022-01-09 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The major areas of activity in the development of MEMS and NEMS solicited and expected at this conference include but are not limited to materials, design, simulation, fabrication, assembly, packaging, experimental verification and analysis of micro and nanocomponents