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This book emphasizes the importance of the fascinating atomistic insights into the defects and the impurities as well as the dynamic behaviors in silicon materi
Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon
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This book contains the first comprehensive review of intrinsic point defects, impurities and their complexes in silicon. Besides compiling the structures, energ
Metal Impurities in Silicon- and Germanium-Based Technologies
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This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals incl
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Despite the vast knowledge accumulated on silicon, germanium, and their alloys, these materials still demand research, eminently in view of the improvement of k
Metal Impurities in Silicon-Device Fabrication
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A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the spe